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Migration of implanted indium in silicon as a function of thermal annealing
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10.1063/1.94006
/content/aip/journal/apl/42/7/10.1063/1.94006
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/7/10.1063/1.94006
/content/aip/journal/apl/42/7/10.1063/1.94006
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/content/aip/journal/apl/42/7/10.1063/1.94006
1983-04-01
2014-07-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Migration of implanted indium in silicon as a function of thermal annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/42/7/10.1063/1.94006
10.1063/1.94006
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