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Self‐confined metallic interconnects for very large scale integration
1.Sung Joon Kim, Senior thesis, California Institute of Technology, May 1983, M. Bartur and M‐A. Nicolet (unpublished).
2.M. Bartur and M.‐A. Nicolet, Appl. Phys. Lett. 40, 175 (1982).
3.M. Bartur and M.‐A. Nicolet, paper presented at the 8th Symposium on Solid State Device Technology (SSSDT), University of Kent at Canterbury, U.K., September 13–16, 1983.
4.R. Pretorius, J. M. Harris, and M.‐A. Nicolet, Solid State Electron 21, 667 (1978).
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