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Bias effects on the deposition of hydrogenated amorphous silicon film in a glow discharge
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10.1063/1.94793
/content/aip/journal/apl/44/4/10.1063/1.94793
http://aip.metastore.ingenta.com/content/aip/journal/apl/44/4/10.1063/1.94793
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/content/aip/journal/apl/44/4/10.1063/1.94793
1984-02-15
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Bias effects on the deposition of hydrogenated amorphous silicon film in a glow discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/44/4/10.1063/1.94793
10.1063/1.94793
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