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Structure of reactively magnetron sputtered Hf‐N films
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10.1063/1.94871
/content/aip/journal/apl/44/7/10.1063/1.94871
http://aip.metastore.ingenta.com/content/aip/journal/apl/44/7/10.1063/1.94871
/content/aip/journal/apl/44/7/10.1063/1.94871
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/content/aip/journal/apl/44/7/10.1063/1.94871
1984-04-01
2014-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structure of reactively magnetron sputtered Hf‐N films
http://aip.metastore.ingenta.com/content/aip/journal/apl/44/7/10.1063/1.94871
10.1063/1.94871
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