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Direct evidence of arsenic clustering in high dose arsenic‐implanted silicon
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10.1063/1.94917
/content/aip/journal/apl/44/8/10.1063/1.94917
http://aip.metastore.ingenta.com/content/aip/journal/apl/44/8/10.1063/1.94917
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/content/aip/journal/apl/44/8/10.1063/1.94917
1984-04-15
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct evidence of arsenic clustering in high dose arsenic‐implanted silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/44/8/10.1063/1.94917
10.1063/1.94917
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