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Solidification kinetics of pulsed laser melted silicon based on thermodynamic considerations
1.This topic has been extensively reported in the literature. See for example the Proceedings of the Materials Research Society Symposium on Laser‐Solid Interactions and the references therein. The most recent proceedings are in Energy Beam‐Solid Interactions and Transient Thermal Processing, edited by J. C. C. Fan and N. M. Johnson (North‐Holland, NY, 1984).
2.G. J. Galvin, M. O. Thompson, J. W. Mayer, P. S. Peercy, R. B. Hammond, and N. Paulter, Phys. Rev. B 27, 1079 (1983).
3.This behavior was calculated by several investigators. See for example P. Baeri and S. U. Campisano, in Laser Annealing of Semiconductors, edited by J. M. Poate and J. W. Mayer (Academic, NY, 1982), Chap. 4;
3.R. F. Wood and G. E. Giles, Phys. Rev. B 23, 2923 (1981). Experimental verification of the thermal transport calculations was provided by the conductance measurements as detailed in Ref. 2.
4.J. W. Cahn, W. B. Hillig, and G. W. Sears, Acta Metall. 12, 1421 (1964).
5.F. Spaepen and D. Turnbull, in Laser Annealing of Semiconductors, edited by J. M. Poate and J. W. Mayer (Academic, NY, 1982), Chap. 2.
6.K. A. Jackson, in Surface Modification and Alloying by Laser, Ion, and Electron Beams, edited by J. M. Poate, G. Foti, and D. C. Jacobson (Plenum, NY, 1983), Chap. 3.
7.J. Q. Broughton, G. H. Gilmer, and K. A. Jackson, Phys. Rev. Lett. 49, 1496 (1982).
8.Calculated from heat capacity tables in CRC Handbook of Chemistry and Physics (Chemical Rubber Company, Boca Raton, 1980). Similar free energies were reported in E. P. Donovan, F. Spaepen, D. Turnbull, J. M. Poate, and D. C. Jacobson, Appl. Phys. Lett. 42, 698 (1983).
9.The curve in Fig. 2 must allow a maximum velocity greater than or equal to the reported by M. O. Thompson and G. J. Galvin, in Laser‐Solid Interactions and Transient Thermal Processing of Materials, edited by J. Narayan, W. L. Brown, and R. A. Lemons (North‐Holland, NY, 1983), p. 57.
10.M. O. Thompson, G. J. Galvin, J. W. Mayer, P. S. Peercy, J. M. Poate, D. C. Jacobson, A. G. Cullis, and N. Chew, Phys. Rev. Lett. 52, 2360 (1984).
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