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Doping level selective photochemical dry etching of GaAs
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10.1063/1.95496
/content/aip/journal/apl/46/8/10.1063/1.95496
http://aip.metastore.ingenta.com/content/aip/journal/apl/46/8/10.1063/1.95496
/content/aip/journal/apl/46/8/10.1063/1.95496
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/content/aip/journal/apl/46/8/10.1063/1.95496
1985-04-15
2014-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Doping level selective photochemical dry etching of GaAs
http://aip.metastore.ingenta.com/content/aip/journal/apl/46/8/10.1063/1.95496
10.1063/1.95496
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