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Pressure dependence of arsenic diffusivity in silicon
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10.1063/1.96283
/content/aip/journal/apl/47/2/10.1063/1.96283
http://aip.metastore.ingenta.com/content/aip/journal/apl/47/2/10.1063/1.96283
/content/aip/journal/apl/47/2/10.1063/1.96283
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/content/aip/journal/apl/47/2/10.1063/1.96283
1985-07-15
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Pressure dependence of arsenic diffusivity in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/47/2/10.1063/1.96283
10.1063/1.96283
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