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Oxygen in titanium nitride diffusion barriers
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10.1063/1.96151
/content/aip/journal/apl/47/5/10.1063/1.96151
http://aip.metastore.ingenta.com/content/aip/journal/apl/47/5/10.1063/1.96151
/content/aip/journal/apl/47/5/10.1063/1.96151
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/content/aip/journal/apl/47/5/10.1063/1.96151
1985-09-01
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Oxygen in titanium nitride diffusion barriers
http://aip.metastore.ingenta.com/content/aip/journal/apl/47/5/10.1063/1.96151
10.1063/1.96151
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