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High resolution electron microscopic and spectroscopic characterization of semi‐insulating polycrystalline silicon and its interface with single‐crystal silicon
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10.1063/1.96763
/content/aip/journal/apl/48/1/10.1063/1.96763
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/1/10.1063/1.96763
/content/aip/journal/apl/48/1/10.1063/1.96763
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/content/aip/journal/apl/48/1/10.1063/1.96763
1986-01-06
2014-10-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High resolution electron microscopic and spectroscopic characterization of semi‐insulating polycrystalline silicon and its interface with single‐crystal silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/1/10.1063/1.96763
10.1063/1.96763
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