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Superior characteristics of nitridized thermal oxide grown on polycrystalline silicon
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10.1063/1.97029
/content/aip/journal/apl/48/2/10.1063/1.97029
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/2/10.1063/1.97029
/content/aip/journal/apl/48/2/10.1063/1.97029
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/content/aip/journal/apl/48/2/10.1063/1.97029
1986-01-13
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Superior characteristics of nitridized thermal oxide grown on polycrystalline silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/2/10.1063/1.97029
10.1063/1.97029
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