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Photochemical vapor deposition of hydrogenated amorphous silicon films from disilane and trisilane using a low pressure mercury lamp
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10.1063/1.96915
/content/aip/journal/apl/48/20/10.1063/1.96915
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/20/10.1063/1.96915
/content/aip/journal/apl/48/20/10.1063/1.96915
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/content/aip/journal/apl/48/20/10.1063/1.96915
1986-05-19
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Photochemical vapor deposition of hydrogenated amorphous silicon films from disilane and trisilane using a low pressure mercury lamp
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/20/10.1063/1.96915
10.1063/1.96915
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