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Material reaction and silicide formation at the refractory metal/silicon interface
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10.1063/1.96829
/content/aip/journal/apl/48/23/10.1063/1.96829
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/23/10.1063/1.96829
/content/aip/journal/apl/48/23/10.1063/1.96829
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/content/aip/journal/apl/48/23/10.1063/1.96829
1986-06-09
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Material reaction and silicide formation at the refractory metal/silicon interface
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/23/10.1063/1.96829
10.1063/1.96829
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