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Nitrogen related doping with implant Si3N4 formation in Si
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10.1063/1.96547
/content/aip/journal/apl/48/5/10.1063/1.96547
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/5/10.1063/1.96547
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/content/aip/journal/apl/48/5/10.1063/1.96547
1986-02-03
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nitrogen related doping with implant Si3N4 formation in Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/48/5/10.1063/1.96547
10.1063/1.96547
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