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Low resistance Pd/Ge/Au and Ge/Pd/Au ohmic contacts to n‐type GaAs
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10.Note that the plotted concentrations of Ga and As in the GaAs substrate do not add to 100%, even though the other elements analyzed are not present in the substrate. This discrepancy arises because the instrumental backgrounds for the other elements are treated by the Auger system computer as elemental intensities and taken into account in computing the atomic concentrations. The apparent concentrations calculated by the computer for the other elements are not plotted for the substrate region.
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