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Damage calculation and measurement for GaAs amorphized by Si implantation
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10.1063/1.97500
/content/aip/journal/apl/49/15/10.1063/1.97500
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/15/10.1063/1.97500
/content/aip/journal/apl/49/15/10.1063/1.97500
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/content/aip/journal/apl/49/15/10.1063/1.97500
1986-10-13
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Damage calculation and measurement for GaAs amorphized by Si implantation
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/15/10.1063/1.97500
10.1063/1.97500
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