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New device to generate Si2H6 for amorphous silicon depositions
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10.1063/1.97459
/content/aip/journal/apl/49/16/10.1063/1.97459
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/16/10.1063/1.97459
/content/aip/journal/apl/49/16/10.1063/1.97459
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/content/aip/journal/apl/49/16/10.1063/1.97459
1986-10-20
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: New device to generate Si2H6 for amorphous silicon depositions
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/16/10.1063/1.97459
10.1063/1.97459
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