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Dislocation filtering in semiconductor superlattices with lattice‐matched and lattice‐mismatched layer materials
1.See, for example, T. W. James and R. E. Stoller, Appl. Phys. Lett. 44, 56 (1984).
2.See the review of strained‐layer superlattices, and references therein, by G. C. Osbourn, P. L. Gourley, I. J. Fritz, R. M. Biefeld, L. R. Dawson, and T. E. Zipperian, in Semiconductors and Semimetals, edited by R. K. Willardson and A. C. Beer (Academic, New York, in press).
3.J. W. Matthews, A. E. Blakeslee, and S. Mader, Thin Solid Films 33, 253 (1976).
4.J. W. Matthews and A. E. Blakeslee, J. Vac. Sci. Technol. 14, 989 (1977);
4.J. W. Matthews and A. E. Blakeslee, J. Cryst. Growth 32, 265 (1976);
4.J. W. Matthews and A. E. Blakeslee, 29, 273 (1975); , J. Cryst. Growth
4.J. W. Matthews and A. E. Blakeslee, 27, 118 (1974)., J. Cryst. Growth
5.Evidence for deflection of selected dislocations at interfaces of where x is in the range 0.3–0.5, has been reported by K. H. Kuesters, B. C. DeCooman, and C. B. Carter, J. Appl. Phys. 58, 4065 (1985).
6.Evidence against dislocation filtering in superlattices has been reported by P. M. Petroff, C. Weisbuch, R. Dingle, A. C. Gossard, and W. Wiegmann, and in AlAs/GaAs superlattices by R. Fischer, D. Neuman, H. Zabel, H. Morkoç, C. Choi, and N. Otsuka, Appl. Phys. Lett. 48, 1223 (1986).
7.These materials are also of current interest for photonic applications; see, for example, H. Kato, N. Iguchi, S. Chika, M. Nakayama, and N. Sano, J. Appl. Phys. 59, 588 (1986).
8.V. S. Speriosu and T. Vreeland, Jr., J. Appl. Phys. 56, 1591 (1984).
9.P. L. Gourley, R. M. Biefeld, and L. R. Dawson, Appl. Phys. Lett. 47, 482 (1985).
10.P. L. Gourley, R. M. Biefeld, and L. R. Dawson, Mater. Res. Soc. Symp. Proc. 56, 229 (1986).
11.We have verified this fact by measuring the absorption coefficient for some of these samples. At 6471 Å the absorption depth is about 0.5 μm while at 4131 Å it is The diffusion length is probably much less than 0.1 μm at 78 K; see P. L. Gourley, J. J. Wiczer, T. E. Zipperian, and L. R. Dawson, Appl. Phys. Lett. 49, 100 (1986).
12.See the review by J. W. Matthews, in Dislocations in Solids, edited by F. R. N. Nabarro (North‐Holland, New York, 1979), Vol. 2, Chap. 7.
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