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Epitaxial growth of β‐SiC thin films on 6H α‐SiC substrates via chemical vapor deposition
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10.1063/1.97479
/content/aip/journal/apl/49/17/10.1063/1.97479
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/17/10.1063/1.97479
/content/aip/journal/apl/49/17/10.1063/1.97479
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/content/aip/journal/apl/49/17/10.1063/1.97479
1986-10-27
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Epitaxial growth of β‐SiC thin films on 6H α‐SiC substrates via chemical vapor deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/17/10.1063/1.97479
10.1063/1.97479
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