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Electrical and optical properties of sputtered TiN x films as a function of substrate deposition temperature
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10.1063/1.97425
/content/aip/journal/apl/49/19/10.1063/1.97425
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/19/10.1063/1.97425
/content/aip/journal/apl/49/19/10.1063/1.97425
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/content/aip/journal/apl/49/19/10.1063/1.97425
1986-11-10
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrical and optical properties of sputtered TiNx films as a function of substrate deposition temperature
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/19/10.1063/1.97425
10.1063/1.97425
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