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Influence of oxygen implantation conditions on the properties of a high‐temperature‐annealed silicon‐on‐insulator material
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10.1063/1.97342
/content/aip/journal/apl/49/21/10.1063/1.97342
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/21/10.1063/1.97342
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/content/aip/journal/apl/49/21/10.1063/1.97342
1986-11-24
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of oxygen implantation conditions on the properties of a high‐temperature‐annealed silicon‐on‐insulator material
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/21/10.1063/1.97342
10.1063/1.97342
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