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Laser photochemical etching of molybdenum and tungsten thin films by surface halogenation
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10.1063/1.97623
/content/aip/journal/apl/49/22/10.1063/1.97623
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/22/10.1063/1.97623
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/content/aip/journal/apl/49/22/10.1063/1.97623
1986-12-01
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser photochemical etching of molybdenum and tungsten thin films by surface halogenation
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/22/10.1063/1.97623
10.1063/1.97623
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