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Morphological effects during low pressure chemical vapor deposition and annealing of undoped polycrystalline silicon layers
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10.1063/1.97594
/content/aip/journal/apl/49/7/10.1063/1.97594
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/7/10.1063/1.97594
/content/aip/journal/apl/49/7/10.1063/1.97594
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/content/aip/journal/apl/49/7/10.1063/1.97594
1986-08-18
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Morphological effects during low pressure chemical vapor deposition and annealing of undoped polycrystalline silicon layers
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/7/10.1063/1.97594
10.1063/1.97594
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