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Improved tribological properties of sputtered MoS x films by ion beam mixing
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10.1063/1.97129
/content/aip/journal/apl/49/9/10.1063/1.97129
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/9/10.1063/1.97129
/content/aip/journal/apl/49/9/10.1063/1.97129
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/content/aip/journal/apl/49/9/10.1063/1.97129
1986-09-01
2014-07-12
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improved tribological properties of sputtered MoSx films by ion beam mixing
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/9/10.1063/1.97129
10.1063/1.97129
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