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Stability of nitrogen‐rich titanium nitride and zirconium nitride films
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10.1063/1.97131
/content/aip/journal/apl/49/9/10.1063/1.97131
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/9/10.1063/1.97131
/content/aip/journal/apl/49/9/10.1063/1.97131
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/content/aip/journal/apl/49/9/10.1063/1.97131
1986-09-01
2014-08-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stability of nitrogen‐rich titanium nitride and zirconium nitride films
http://aip.metastore.ingenta.com/content/aip/journal/apl/49/9/10.1063/1.97131
10.1063/1.97131
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