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Perforation seed structure in electron beam recrystallized silicon‐on‐insulator films
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10.1063/1.98033
/content/aip/journal/apl/50/12/10.1063/1.98033
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/12/10.1063/1.98033
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/content/aip/journal/apl/50/12/10.1063/1.98033
1987-03-23
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Perforation seed structure in electron beam recrystallized silicon‐on‐insulator films
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/12/10.1063/1.98033
10.1063/1.98033
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