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Reactively sputtered RuO2 diffusion barriers
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10.1063/1.98012
/content/aip/journal/apl/50/13/10.1063/1.98012
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/13/10.1063/1.98012
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/content/aip/journal/apl/50/13/10.1063/1.98012
1987-03-30
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reactively sputtered RuO2 diffusion barriers
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/13/10.1063/1.98012
10.1063/1.98012
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