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Thin‐film reaction between Ti and Si3N4
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10.1063/1.98259
/content/aip/journal/apl/50/15/10.1063/1.98259
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/15/10.1063/1.98259
/content/aip/journal/apl/50/15/10.1063/1.98259
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/content/aip/journal/apl/50/15/10.1063/1.98259
1987-04-13
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thin‐film reaction between Ti and Si3N4
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/15/10.1063/1.98259
10.1063/1.98259
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