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Superior characteristics of thermal oxide layers grown on amorphous silicon films
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10.1063/1.97951
/content/aip/journal/apl/50/17/10.1063/1.97951
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/17/10.1063/1.97951
/content/aip/journal/apl/50/17/10.1063/1.97951
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/content/aip/journal/apl/50/17/10.1063/1.97951
1987-04-27
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Superior characteristics of thermal oxide layers grown on amorphous silicon films
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/17/10.1063/1.97951
10.1063/1.97951
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