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Large volume, high density rf inductively coupled plasma
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10.1063/1.98257
/content/aip/journal/apl/50/17/10.1063/1.98257
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/17/10.1063/1.98257
/content/aip/journal/apl/50/17/10.1063/1.98257
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/content/aip/journal/apl/50/17/10.1063/1.98257
1987-04-27
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large volume, high density rf inductively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/17/10.1063/1.98257
10.1063/1.98257
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