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Continuum modeling of argon radio frequency glow discharges
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10.1063/1.98183
/content/aip/journal/apl/50/9/10.1063/1.98183
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/9/10.1063/1.98183
/content/aip/journal/apl/50/9/10.1063/1.98183
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/content/aip/journal/apl/50/9/10.1063/1.98183
1987-03-02
2014-09-18
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Scitation: Continuum modeling of argon radio frequency glow discharges
http://aip.metastore.ingenta.com/content/aip/journal/apl/50/9/10.1063/1.98183
10.1063/1.98183
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