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Direct writing onto Si by electron beam stimulated etching
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10.1063/1.98614
/content/aip/journal/apl/51/19/10.1063/1.98614
http://aip.metastore.ingenta.com/content/aip/journal/apl/51/19/10.1063/1.98614
/content/aip/journal/apl/51/19/10.1063/1.98614
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/content/aip/journal/apl/51/19/10.1063/1.98614
1987-11-09
2014-09-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct writing onto Si by electron beam stimulated etching
http://aip.metastore.ingenta.com/content/aip/journal/apl/51/19/10.1063/1.98614
10.1063/1.98614
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