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Mechanism of a hydrogenating polycrystalline silicon in hydrogen plasma annealing
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10.1063/1.98575
/content/aip/journal/apl/51/20/10.1063/1.98575
http://aip.metastore.ingenta.com/content/aip/journal/apl/51/20/10.1063/1.98575
/content/aip/journal/apl/51/20/10.1063/1.98575
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/content/aip/journal/apl/51/20/10.1063/1.98575
1987-11-16
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Mechanism of a hydrogenating polycrystalline silicon in hydrogen plasma annealing
http://aip.metastore.ingenta.com/content/aip/journal/apl/51/20/10.1063/1.98575
10.1063/1.98575
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