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Implantation damage and the anomalous transient diffusion of ion‐implanted boron
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10.1063/1.98375
/content/aip/journal/apl/51/7/10.1063/1.98375
http://aip.metastore.ingenta.com/content/aip/journal/apl/51/7/10.1063/1.98375
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/content/aip/journal/apl/51/7/10.1063/1.98375
1987-08-17
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Implantation damage and the anomalous transient diffusion of ion‐implanted boron
http://aip.metastore.ingenta.com/content/aip/journal/apl/51/7/10.1063/1.98375
10.1063/1.98375
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