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Experimental study on the correlation between thermal‐wave signals and dopant profiles for silicon‐implanted GaAs
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10.1063/1.99307
/content/aip/journal/apl/52/1/10.1063/1.99307
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/1/10.1063/1.99307
/content/aip/journal/apl/52/1/10.1063/1.99307
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/content/aip/journal/apl/52/1/10.1063/1.99307
1988-01-04
2014-12-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental study on the correlation between thermal‐wave signals and dopant profiles for silicon‐implanted GaAs
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/1/10.1063/1.99307
10.1063/1.99307
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