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Self‐consistent simulation of a parallel‐plate rf discharge
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10.1063/1.99327
/content/aip/journal/apl/52/1/10.1063/1.99327
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/1/10.1063/1.99327
/content/aip/journal/apl/52/1/10.1063/1.99327
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/content/aip/journal/apl/52/1/10.1063/1.99327
1988-01-04
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self‐consistent simulation of a parallel‐plate rf discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/1/10.1063/1.99327
10.1063/1.99327
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