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Radii broadening due to molecular collision in focused ion beams
1.J. W. Ward, M. W. Utlaut, and R. L. Kubena, J. Vac. Sci. Technol. B 5, 169 (1987).
2.K. D. Cummings, L. R. Harriot, G. C. Chi, and F. W. Ostcrmayer, Jr., SPIE Electron‐Beam, X‐ray, and Ion‐Beam Techniques for Submicron Lithographies V632, 93 (1985).
3.S. Shukuri, Y. Wada, M. Tamura, K. Umemura, and T. Ishitani, in Proceedings of the 17th Symposium on Ion Implantation and Submicron Fabrication (The Institute of Physical and Chemical Research, Wako, Japan, 1986), p. 189.
4.Y. Kawanami, T. Ishitani, and K. Umemura, in Proceedings of the Annual Meeting of Japanese Society of Applied Physics (Japanese Society Applied Physics, Tokyo, 1986), p. 340 (in Japanese).
5.M. Komuro, H. Hiroshima, T. Kanayama, K. Tanoue, and T. Tsurushima, in Proceedings of the 9th Symposium on Ion Sources and Ion‐Assisted Technology (Kyoto University, Kyoto, 1985), p. 73.
6.K. Leyland, D. G. Armour, G. Carter, and J. H. Freeman, Inst. Phys. Conf. Ser. No. 38 (The Institute of Physics, London, England, 1977), p. 175.
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