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Efficiency of oxygen plasma cleaning of reactive ion damaged silicon surfaces
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10.1063/1.99269
/content/aip/journal/apl/52/11/10.1063/1.99269
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/11/10.1063/1.99269
/content/aip/journal/apl/52/11/10.1063/1.99269
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/content/aip/journal/apl/52/11/10.1063/1.99269
1988-03-14
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Efficiency of oxygen plasma cleaning of reactive ion damaged silicon surfaces
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/11/10.1063/1.99269
10.1063/1.99269
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