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Ellipsometric spectra of silicon‐on‐insulator wafers
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10.1063/1.99207
/content/aip/journal/apl/52/13/10.1063/1.99207
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/13/10.1063/1.99207
/content/aip/journal/apl/52/13/10.1063/1.99207
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/content/aip/journal/apl/52/13/10.1063/1.99207
1988-03-28
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ellipsometric spectra of silicon‐on‐insulator wafers
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/13/10.1063/1.99207
10.1063/1.99207
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