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Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation
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10.1063/1.99674
/content/aip/journal/apl/52/15/10.1063/1.99674
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/15/10.1063/1.99674
/content/aip/journal/apl/52/15/10.1063/1.99674
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/content/aip/journal/apl/52/15/10.1063/1.99674
1988-04-11
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation
http://aip.metastore.ingenta.com/content/aip/journal/apl/52/15/10.1063/1.99674
10.1063/1.99674
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