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New fluid filter structure in silicon fabricated using a self‐aligning technique
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10.1063/1.99953
/content/aip/journal/apl/53/16/10.1063/1.99953
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/16/10.1063/1.99953
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/content/aip/journal/apl/53/16/10.1063/1.99953
1988-10-17
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: New fluid filter structure in silicon fabricated using a self‐aligning technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/16/10.1063/1.99953
10.1063/1.99953
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