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Hydrogen plasma induced defects in silicon
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10.1063/1.99810
/content/aip/journal/apl/53/18/10.1063/1.99810
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/18/10.1063/1.99810
/content/aip/journal/apl/53/18/10.1063/1.99810
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/content/aip/journal/apl/53/18/10.1063/1.99810
1988-10-31
2014-07-13
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hydrogen plasma induced defects in silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/18/10.1063/1.99810
10.1063/1.99810
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