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Impurity segregation correlated with microstructure in buried oxide silicon‐on‐insulator structures
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10.1063/1.100387
/content/aip/journal/apl/53/2/10.1063/1.100387
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/2/10.1063/1.100387
/content/aip/journal/apl/53/2/10.1063/1.100387
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/content/aip/journal/apl/53/2/10.1063/1.100387
1988-07-11
2014-12-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impurity segregation correlated with microstructure in buried oxide silicon‐on‐insulator structures
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/2/10.1063/1.100387
10.1063/1.100387
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