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Hydrogen concentration profiles in as‐deposited and annealed phosphorus‐doped silicon dioxide films
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12.Please note that the distortion of the C‐V curves prior to the onset of the inversion has been purposely eliminated from the present discussion. More detailed and complete work can be found in Ref. 1 and in the forthcoming Ph.D. thesis of J. Z. Xie, Rennssalaer Polytechnic Institute, 1988.
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