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Point defect enhanced grain growth in silicon thin films: The role of ion bombardment and dopants
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10.1063/1.100303
/content/aip/journal/apl/53/22/10.1063/1.100303
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/22/10.1063/1.100303
/content/aip/journal/apl/53/22/10.1063/1.100303
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/content/aip/journal/apl/53/22/10.1063/1.100303
1988-11-28
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Point defect enhanced grain growth in silicon thin films: The role of ion bombardment and dopants
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/22/10.1063/1.100303
10.1063/1.100303
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