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Elastic properties of silicon oxynitride films determined by picosecond acoustics
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10.1063/1.100253
/content/aip/journal/apl/53/23/10.1063/1.100253
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/23/10.1063/1.100253
/content/aip/journal/apl/53/23/10.1063/1.100253
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/content/aip/journal/apl/53/23/10.1063/1.100253
1988-12-05
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Elastic properties of silicon oxynitride films determined by picosecond acoustics
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/23/10.1063/1.100253
10.1063/1.100253
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