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Medium energy ion scattering analysis of reactive ion etched Si(001) surfaces
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10.1063/1.100265
/content/aip/journal/apl/53/23/10.1063/1.100265
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/23/10.1063/1.100265
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/content/aip/journal/apl/53/23/10.1063/1.100265
1988-12-05
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Medium energy ion scattering analysis of reactive ion etched Si(001) surfaces
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/23/10.1063/1.100265
10.1063/1.100265
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