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Application of spectroscopic ellipsometry to complex samples
1.M. Erman, J. B. Theeten, N. Vodjdani, and Y. Demay, J. Vac. Sci. Technol. B 1, 328 (1983).
2.Paul G. Snyder, Martin C. Rost, George H. Bu‐Abbad, John A. Woollam, and Samuel A. Alterovitz, J. Appl. Phys. 60, 3293 (1986).
3.R. W. Stobie, B. Rao, and Dignam, J. Opt. Soc. Am. 65, 25 (1975).
4.D. E. Aspnes and A. A. Studna, Appl. Opt. 14, 220 (1975);
4.D. E. Aspnes and A. A. Studna, Rev. Sci. Instrum. 49, 291 (1978).
5.Rotation of the fixed (and only) polarizer after the sample to both plus and minus 30°, with the first fixed polarizer at 0°, was found in my calculations to provide a result similar to that discussed by R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 64, 1459 (1974) for the more common rotating‐analyzer ellipsometers. The disadvantage of this setting is that, for the first polarizer at 0°, tan Ψ is not defined by the measurement when A more complete description of the apparatus is in preparation.
6.D. E. Aspnes, S. M. Kelso, R. A. Logan, and R. Bhat, J. Appl. Phys. 60, 754 (1986);
6.D. E. Aspnes and A. A. Studna, Phys. Rev. B 27, 985 (1983).
7.R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North‐Holland, Amsterdam, 1977).
8.See, e.g., Jorge J. More, Burton S. Garbow, and Kenneth E. Hillstrom, “User Guide for MINPACK‐1,” Argonne National Laboratory publication ANL‐80‐74, 1980.
9.See, e.g., D. E. Aspnes, SPIE Proc. 276, 188 (1981).
10.G. H. Bu‐Abbud, N. M. Bashara, and John A. Woolam, Thin Solid Films 138, 27 (1986).
11.D. E. Aspnes, J. B. Theeten, and F. Hottier, Phys. Rev. B 20, 3292 (1979).
12.D. E. Aspnes and J. B. Theeten, J. Appl. Phys. 50, 4928 (1979).
13.D. E. Aspnes and A. A. Studna, SPIE Proc. 276, 227 (1981);
13.see also Ref. 6.
14.F. J. Grunthaner, P. J. Grunthaner, R. P. Vasquez, B. F. Lewis, J. Maserjian, and A. Madhukar, J. Vac. Sci. Technol. 16, 1443 (1979).
15.Paul G. Snyder, Jae E. Oh, John A. Woollam, and R. E. Owens, Appl. Phys. Lett. 51, 770 (1987).
16.In the system, thicker layers have been probed using below bandgap light; see, e.g., J. Narayan, S. Y. Kim, K. Vedam, and R. Manukonda, Appl. Phys. Lett. 51, 343 (1987).
17.Samuel A. Alterovitz, Paul G. Snyder, Kenneth G. Merkel, John A. Woolam, David C. Radulescu, and Lester F. Eastman, J. Appl. Phys. 63, 5081 (1988).
18.K. Vedam, P. J. McMarr, and J. Narayan, Appl. Phys. Lett. 47, 339 (1985).
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