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Advanced lift‐off planarization process for Josephson integrated circuits
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10.1063/1.99906
/content/aip/journal/apl/53/4/10.1063/1.99906
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/4/10.1063/1.99906
/content/aip/journal/apl/53/4/10.1063/1.99906
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/content/aip/journal/apl/53/4/10.1063/1.99906
1988-07-25
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Advanced lift‐off planarization process for Josephson integrated circuits
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/4/10.1063/1.99906
10.1063/1.99906
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