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Reverse dopant redistribution during the initial stages of the oxidation of heavily doped silicon in dry oxygen
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10.1063/1.100618
/content/aip/journal/apl/53/6/10.1063/1.100618
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/6/10.1063/1.100618
/content/aip/journal/apl/53/6/10.1063/1.100618
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/content/aip/journal/apl/53/6/10.1063/1.100618
1988-08-08
2014-11-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reverse dopant redistribution during the initial stages of the oxidation of heavily doped silicon in dry oxygen
http://aip.metastore.ingenta.com/content/aip/journal/apl/53/6/10.1063/1.100618
10.1063/1.100618
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